Corrosion & Ozone Resistant Compact Vacuum Valves for Extremely Harsh Semiconductor or Solar Processes
Wednesday, July 28, 2010 at 01:09PM Available in angle and inline configurations, Corrosion and Ozone Resistant Vacuum Valves utilize patented technology that completely seals off valve bellows, keeping reactive and corrosive gases from contacting and collecting on bellows surface when valve is open. Units come with air solenoid for electro-pneumatic control of valve and limit switch assembly for remote indication in open or closed position. In event of power loss, poppet valves will automatically close.
MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced a series of Corrosion and Ozone Resistant Valves, designed for longer life in extremely harsh semiconductor or solar processes. The valves feature patented technology that completely seals off the valve bellows, keeping reactive and corrosive gases such as O3, NF3 and CL2 from contacting and collecting on the bellows surface when the valve is open. Extremely durable and dependable, the Corrosion and Ozone Resistant Valve has a small profile and is low in cost. The bellows-sealed poppet valve ensures high cycle life and easy maintenance.
The Corrosion Resistant Valve is available in angle and inline configurations, for ease of integration into new tool designs. High flow port sizes, including NW40 and NW50, use maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz® or Perlast® for higher temperature conditions and increased chemical resistance. The Corrosion and Ozone Resistant Valve is available in 6061 aluminum, and 304 and 316 stainless steel materials, to minimize corrosion. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.
The Corrosion Resistant Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close.
About MKS:
MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.
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